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Патент США №

5931713

Автор(ы)

Watkins и др.

Дата выдачи

03 августа 1999 г.

Display device with grille having getter material



РЕФЕРАТ

A field emission display has an anode with a grille made at least in part of a getter material. The grille defines regions that are coated with phosphor to form pixels, and also getters free molecules within a sealed display. The getter material can alternatively be formed directly on at least a part of the grille, or over the grille on an intermediate layer.

Авторы:

Charles M. Watkins (Meridian, ID), David A. Cathey (Boise, ID)

Заявитель:

Micron Technology, Inc. (Boise, ID)

ID семейства патентов

25231788

Номер заявки:

 08/820,815

Дата регистрации:

19 марта 1997 г.

Класс патентной классификации США:

445/55

Класс совместной патентной классификации:

H01J 9/20 (20130101); H01J 29/085 (20130101); H01J 29/94 (20130101)

Класс международной патентной классификации (МПК):

H01J 29/94 (20060101); H01J 29/00 (20060101); H01J 29/08 (20060101); H01J 29/02 (20060101); H01J 9/20 (20060101); H01J 009/39 ()

Область поиска:

;445/24,25,41,55

Использованные источники

[Referenced By]

Патентные документы США

3665241May 1972Spindt et al.
3755704August 1973Spindt et al.
3812559May 1974Spindt et al.
3870917March 1975Cuny
3926832December 1975Barosi
4297082October 1981Wurtz et al.
4312669January 1982Boffito et al.
4743797May 1988Emberson et al.
4789309December 1988Giorgi
4839085June 1989Sandrock et al.
4874339October 1989Bratz
4891110January 1990Libman et al.
4940300July 1990Giorgi
4977035December 1990Travis et al.
5057047October 1991Greene et al.
5060051October 1991Usuda
5064396November 1991Spindt
5186670February 1993Doan et al.
5207607May 1993Nagano et al.
5210472May 1993Casper et al.
5223766June 1993Nakayama et al.
5229331July 1993Doan et al.
5283500February 1994Kochanski
5453659September 1995Wallace et al.
5469014November 1995Itoh et al.
5520563May 1996Wallace et al.
5688708November 1997Kato et al.
5689151November 1997Wallace et al.
5693438December 1997Liu et al.

Зарубежные патентные документы

2-295032May 1990JP

Другие источники


Borghi, M., Dr., ST 121 and ST 122 Porous Coating Getters, New Edition Nov. 19, 1992, Original Jul. 1987, pp. 3-13. .
Carella, S., Boffito, C., and Carretti, C., "Gettering in Small Size Vacuum Microelectronic Devices", SAES Getters S.p.A. .
Giorgi, T.A., Proc. 6th Internl, Vacuum, Congr. 1974, Japan J. Appl. Phys, Suppl. 2, Pt. 1974, "Getters and Gettering", pp. 53-60. .
Giorgi, E. and Ferrario B., "High Porosity Thick Film Getters", pp. 1-10, Figs. 1-8, and References. .
Giorgi E. and Ferrario, B., IEEE Transactions on Electron Devices, vol. 36, No. 11, Nov. 1989, High-Porosity Thick-Film Getters, pp. 2744-2747. .
Giorgi, T.A., Ferrario, B., and Storey, B., J. Vac. Sci. Technol, A3 (2) Mar./Apr. 1985, "An updated review of getters and gettering", pp. 417-423. .
SAES GETTERS S.p.A., ST 171 Non-Evaporable Porous Getters. .
SAES GETTERS S.p.A., ST 175 Non-Evaporable Porous Getters, pp. 1-5, Figs. 1-6..

Главный эксперт: Ramsey; Kenneth J.
Уполномоченный, доверенный или фирма: Hale and Dorr LLP


ФОРМУЛА ИЗОБРЕТЕНИЯ



What is claimed is:

1. A method for making an anode in a display device, the method comprising:

providing getter material on a substrate to form a grille that defines a plurality of pixel regions on the substrate so that the grille includes getter material; and

coating the pixel regions with phosphor;

wherein the providing includes applying the getter material as a powder and sintering the powder.

2. A method for making an anode in a display device, the method comprising:

providing getter material on a substrate to form a grille that defines a plurality of pixel regions on the substrate so that the grille includes getter material; and

coating the pixel regions with phosphor;

wherein the substrate includes a transparent dielectric layer and a transparent conductive layer, and the providing includes depositing the getter material as a powder on the conductive layer.

3. The method of claim 2, further comprising:

vacuum sealing in a package the anode and a cathode that has a plurality of conical emitters associated with each pixel region and oriented to emit electrons to the pixel regions when the emitters are activated, and

heating the powder within the package to activate the getter.

4. The method of claim 3, wherein the heating includes inductively heating with an RF field.

5. The method of claim 3, wherein the heating includes rapid thermal processing of the getter.

6. The method of claim 3, wherein the heating includes heating with a laser.

7. The method of claim 3, wherein the heating includes inductively heating with a microwave field.

8. The method of claim 3, wherein the vacuum sealing and the heating are performed simultaneously.

9. A method for making an anode in a display device, the method comprising:

providing getter material on a substrate to form a grille that defines a plurality of pixel regions on the substrate so that the entire grille is formed from getter material; and

coating the pixel regions with phosphor.

10. The method of claim 9, further comprising:

vacuum sealing in a package the anode and a cathode that has a plurality of conical emitters associated with each pixel region and oriented to emit electrons to the pixel regions when the emitters are activate d, and

heating the powder within the package to activate the getter.

11. The method of claim 10, wherein the heating includes inductively heating with an RF field.

12. The method of claim 10, wherein the heating includes rapid thermal processing of the getter.

13. The method of claim 12, wherein the heating includes inductively heating with an RF field.

14. The method of claim 10, wherein the heating includes heating with a laser.

15. The method of claim 10, wherein the heating includes inductively heating with a microwave field.

16. The method of claim 10, wherein the vacuum sealing and the heating are performed simultaneously.

17. The method of claim 9, wherein the getter material is a powder.

18. A method for making a display comprising:

forming a grille on a transparent dielectric layer to define a plurality of pixel regions;

forming a transparent conductive layer over the transparent dielectric layer and the grille;

providing getter material over the transparent conductive layer; and

coating the pixel regions with phosphor.

19. The method of claim 18, wherein the providing includes providing the getter material at selected locations on the conductive layer and over the grille.

20. The method of claim 18, wherein the getter material is a powder.

21. The method of claim 18, further comprising sealing the grille, dielectric layer, conductive layer, and getter in a packages and thereafter heating the getter.

22. The method of claim 21, wherein the heating includes rapid thermal processing of the getter.

23. The method of claim 21, wherein the heating includes heating with a laser.

24. The method of claim 21, wherein the heating includes inductively heating with a microwave field.

25. The method of claim 21, wherein the sealing and the heating are performed simultaneously.

26. A method for making a display comprising:

forming a grille on a substrate to define a plurality of pixel regions;

providing getter material over at least part of the grille;

coating the pixel regions with phosphor to form an anode;

vacuum sealing the substrate, grille, and getter material in a package with a cathode having a plurality of conical electron emitters to form a field emission display device; and

activating the getter material by inductively heating the getter material within the package after the vacuum sealing step.

27. The method of claim 26, wherein the activating includes inductively heating with an RF field.

28. The method of claim 26, wherein the activating includes inductively heating with a microwave field.

29. The method of claim 26, wherein the activating includes inductively heating.

30. A method for making a display comprising:

forming a grille on a substrate to define a plurality of pixel regions;

providing getter material over at least part of the grille;

coating the pixel regions with phosphor to form an anode;

vacuum sealing the substrate, grille, anal getter material in a package with a cathode having a plurality of conical electron emitters to form a field emission display device; and

activating the getter material within the package after the vacuum sealing step, wherein the activating includes heating with a laser.


ОПИСАНИЕ




ПРЕДПОСЫЛКИ СОЗДАНИЯ ИЗОБРЕТЕНИЯ



This invention relates to display devices, and more particularly to getters used in field emission displays (FEDs).

In a typical FED, a cathode has a plurality of conical emitters that addressably and controllably emit electrons, and an anode has a transparent dielectric layer, a transparent conductive layer over the dielectric layer, a grille formed over the conductive layer to define pixel regions, and a phosphor coating applied to the conductive layer in the defined pixel regions. When activated, the emitters emit electrons to the pixel regions, to produce a visible light image. The light at each pixel is controlled by the current in the emitters facing the respective pixel.

The cathode and anode are assembled very close together, e.g., about 200-250 microns, in a package with a vacuum seal, such as a frit glass seal, at or near the perimeter of the anode and cathode. In the small space between the anode and cathode, any residual gases or molecules can cause arcing or shorting. To address this problem, a getter is placed in the display package and is then activated to sorb free molecules. Placement of the getter is problematic, however, because of the small space. In some FEDs, the cathode is mounted between the anode (also referred to as a faceplate) and a backplate; in this case, a getter can be placed in the space between the cathode and the backplate. While saving space, such placement puts the getter away from the space between the cathode and anode where gettering is needed most. In other cases, the getter is placed on the side of the cathode and anode, but such placement increases the width of the display without increasing the screen size.


СУЩНОСТЬ ИЗОБРЕТЕНИЯ



The present invention includes a display with two parallel plates and a getter that is well-positioned between the plates for gettering molecules without adversely affecting the size of the display.

According to one aspect of the present invention, a display has an anode with a substrate and a grille formed on the substrate and made at least in part of a getter material. The grille defines a plurality of pixel regions that are coated with phosphor before the display is assembled and vacuum sealed. After the display is sealed or during sealing, the getter is subjected to energy that activates the getter without causing other portions of the display to exceed their respective breakdown temperatures. The process of applying the getter can be performed with masking and etching techniques. The display is preferably an FED having a cathode that has a plurality of conical emitters for emitting electrons to the pixel regions. The anode assembled and vacuum sealed with the cathode so they are parallel to each other.

According to another aspect of the present invention, a display has a grille on a substrate to define pixel regions to be coated with phosphor, and a getter material formed over at least a portion of the grille but not over the defined regions. The getter can be formed over the entire grille or only over selected rows and/or columns of the grille. The getter can be formed directly on the grille, or over the grille but directly on an intermediate conductive layer.

By making the grille at least in part out of a getter material, a getter is provided at a useful location for gettering, i.e., between the anode and the cathode. Because the getter is serving both a getter function and a grille function, the getter does not require additional space or an additional number of components over a display without a getter. The display can therefore omit the need for an additional getter. If the getter material is put over the grille, it provides gettering without adding to the width of the device. Other features and advantages will become apparent from the following detailed description, drawings, and claims.


КРАТКОЕ ОПИСАНИЕ РИСУНКОВ



FIG. 1 is a cross-sectional view of a packaged display.

FIG. 2 is a cross-sectional view of an anode in the display of FIG. 1.

FIG. 3 is a plan view of the anode of FIG. 2.

FIGS. 4-5 are cross-sectional views illustrating steps for making the anode of FIG. 2.

FIG. 6 is a cross-sectional view of a device for forming a layer of getter material.

FIG. 7 is a schematic plan view illustrating rows and columns of a grille.

FIGS. 8-9 are cross-sectional views of an anode according to further embodiments of the present invention.


ПОДРОБНОЕ ОПИСАНИЕ



Referring to FIG. 1, a field emission display (FED) 10 has an anode (faceplate) 12 and a cathode 14 oriented in parallel and separated by dielectric spacers 13. Anode 12 has a transparent dielectric layer 16, preferably made of glass, and a transparent conductive layer 18, preferably made of indium tin oxide (ITO), formed on layer 16 and facing cathode 14. In cathode 14, a plurality of generally conical emitters 15 are formed on a series of conductive strips 17 and are surrounded by a dielectric oxide layer 11 and a conductive extraction grid 19 as is generally known. Conductive strips 17 are formed on a substrate 21 that may be glass or single crystal silicon. The cathode can be formed directly on a backplate, or it can be formed between the anode/faceplate and a separate backplate. In either case, the anode and cathode are disposed close together in a vacuum sealed package.

Referring to FIGS. 2-3, which show anode 12 in more detail, a grille 20 is formed on conductive layer 18 to define a number of pixel regions 22 (a single pixel area on the display screen will typically have multiple pixel regions). Regions 22 are then coated with phosphor particles 24. Such a grille is typically made of a black matrix material, such as cobalt oxide, manganese oxide, diaqueous graphite (DAG), or a combination of a layer of chrome oxide and a layer of chrome. Each pixel region has a large plurality (e.g., 100) of conical emitters 13 (FIG. 1) associated with it.

According to one embodiment of the present invention, grille 20 is made at least in part of a getter material. An exemplary suitable getter is a powder sold under the tradename St 707 by SAES Getters S.p.A of Milan, Italy. This particular getter is nonevaporable and is an alloy of zirconium (Zr), vanadium (V), and iron (Fe). This getter has a surface that sorbs free molecules until it is saturated. It can then be activated (or reactivated) at relatively low temperatures, e.g., 450.degree. C. for 10 minutes, or at lower temperature with heating for a longer period of time. Such activation causes previously sorbed molecules to diffuse into the material, leaving the surface of the getter free to sorb further molecules. These processes of saturation and activation can be repeated many times with such a nonevaporable getter. Other getters and types of getters such as appropriate evaporable getters could also be used. Other known getter materials include titanium, barium, aluminum, and calcium.

The substrate of anode 12, particularly glass dielectric layer 16, may include material with a breakdown temperature below the activation temperature of the getter material. As used here, "breakdown temperature" refers to the temperature at which the substrate undergoes an unacceptable change in viscosity or other physical property. The activation energy is provided such that the temperature of the other parts of anode 12 remain below their respective breakdown temperatures. The heat used to hermetically seal the anode and cathode can activate the getter; alternatively, after the package is sealed, heat can be applied to the getter in one of a number of ways, e.g., with rapid thermal processing (RTP), with an RF or a microwave field, with laser energy, or with ultrasonic energy. The getter should be heated to its activation temperature at a rate that is fast enough to cause activation, but slow enough to avoid heating the other components to their breakdown temperatures.

Referring to FIG. 4, a method for forming a grille 46 with at least some getter material includes steps of providing a powder 50 through a removable patterned mask 48, such as a photoresist mask, and removing mask 48 to leave pixel regions where mask 48 previously covered substrate 46. Powder 50 is sintered to substrate 46 with a sintering energy (that may also activate the getter prior to sealing). The sintered powder thus forms the grille or a part thereof. The regions defined by the grille ale then coated with phosphor, the anode and cathode are sealed together, and if needed, the getter is then activated.

Referring to FIG. 5, another method for forming a grille includes providing the getter material as a continuous layer 56 over a substrate 58, forming a photomask 60 over the getter layer 56, and forming holes 62 in layer 56 by etching. After etching, photomask 60 is removed. Phosphor is then deposited in holes 62 and the device is assembled by known processes. The getter can then be activated if not already activated by the heat during assembly.

Referring to FIG. 6, one method for applying a getter material to a substrate 38 (shown here with a glass layer and a conductive layer) in a continuous layer includes applying a voltage V between substrate 38 and an electrode 40, with electrode 40 and substrate 38 in an electrophoretic bath 42. The getter material can then be partially removed as discussed, for example, in connection with FIG. 6.

Referring to FIG. 7, lines 70 and 72 respectively represent rows and columns of a grille that defines phosphor-coated regions 74. While the getter material can be used to form the entire grille, it can also be used to form a part of the grille. Accordingly, in one embodiment of the present invention, the entire grille, i.e., all of rows 70 and column 72, consist primarily of the getter material. In another embodiment, part of the grille is made from a nongettering material, such as black matrix material, while selected rows and/or columns or portions thereof are made from the getter material. In such a case, the getter material could be used for every second, third, or generally n-th row or column. It is not necessary, however, for there to be a regular pattern; the getter can be formed in an arbitrary form. As shown in FIG. 7, every third row 70a is made of getter, while the other rows and all the columns are made from black matrix. If RF inductive heating is to be used, the ends of adjacent rows or columns made of getter material can be electrically coupled together, e.g., with getter connection pieces 78, such that the getter material forms a number of extended rectangular rings.

Referring to FIG. 8, in another embodiment, an anode 80 has a substrate 82 with glass layer 84 and conductive layer 86. A black matrix grille 88 is patterned on substrate 82, and then a layer 90 of getter material is formed over at least part of grille 88, e.g., through a mask. In this case, the getter material can be patterned over all of the rows and all of the columns that make up grille 88, or it can be patterned over selective n-th rows and/or columns, and if desired connected at the ends to form closed loops, or even formed in a more arbitrary and non-regular manner. As shown here, every second row or column has a getter layer.

The amount of getter material that is used, i.e., the number of rows, columns, or parts of the grille that are formed of getter material or that have getter material formed thereon, will depend on the extent to which such gettering is needed during the lifetime of the operation of the display. If substantial gettering is required, all of the grille can be made of, or covered with, getter material. If less gettering is needed, only small parts can be made of, or covered with, getter material.

Referring to FIG. 9, in yet another embodiment of the present invention, an anode/faceplate 100 has a grille 102 formed over a transparent dielectric layer 104, preferably made of glass. A conductive layer 106, preferably indium tin oxide (ITO), is then formed over grille 102 and layer 104. A getter material 108 is formed over conductive layer 106, preferably at locations where grille 102 is formed. This location is desirable so that the getter material does not block electrons that would otherwise not be blocked by grille 102 anyway. As shown in FIG. 9, getter material 108 is formed over grille 102 with an intermediate conductive layer 106 and is shown formed with lesser width and over each portion of the grille. The width, the number of rows or columns of the grille over which the getter is formed, and the pattern of getter material can be varied as discussed above.

Having described embodiments to the present invention, it should be apparent that modifications can be made without departing from the scope of the invention as defined by the appended claims. While the grille made at least in part of getter material preferably replaces all other getters and hence preferably constitutes substantially all of the getter material in the sealed package, other getters could be provided in the package as needed.

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