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Pat. 10134888 United States, Int. Cl.22 H01L 29/739, H01L 21/761, H01L 29/06, H01L 29/10, H01L 29/40, H01L 29/66, H02M 7/537. Semiconductor device and method of manufacturing the same : Appl. N 15/992405 : Filed 30.05.2018 : Pub. 20.11.2018 : / Nao Nagata ; Assignee Renesas Electronics Corp ; NN p. : patents.google.com : URL: https://patents.google.com/patent/US10134888/en?oq=US10134888.html (дата обращения: ДД.ММ.ГГГГ).