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Pat. 10177218 United States, Int. Cl.22 H01L 27/06, H01L 29/06, H01L 29/10, H01L 29/423, H01L 29/78, H01L 29/861, H02M 3/158, H01L 27/092. Vertical semiconductor structure : Appl. N 15/365335 : Filed 30.11.2016 : Pub. 08.01.2019 : / Frederic Lanois, Alexei Ankoudinov, Vladimir Rodov ; Assignee Stimicroelectronics (Tours) Sas ; NN p. : patents.google.com : URL: https://patents.google.com/patent/US10177218/en?oq=US10177218.html (дата обращения: ДД.ММ.ГГГГ).