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Pat. 10244615 United States, Int. Cl.22 H05H 1/46, H01J 37/32, H01J 37/34, H01L 21/203, H01L 21/31, H02M 5/08, H02M 5/42, H02M 7/12, C23C 14/34. Radio frequency power source device, and power source for dual cathodes : Appl. N 15/542977 : Filed 20.02.2015 : Pub. 26.03.2019 : / Itsuo Yuzurihara, Shinichi Kodama, Toshiyuki Adachi ; Assignee Kyosan Electric Manufacturing Co Ltd ; NN p. : patents.google.com : URL: https://patents.google.com/patent/US10244615/en?oq=US10244615.html (дата обращения: ДД.ММ.ГГГГ).