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Pat. 10276351 United States, Int. Cl.22 H01J 37/32, H02M 3/158. High-frequency power generator with enhanced pulse function : Appl. N 16/182538 : Filed 06.11.2018 : Pub. 30.04.2019 : / Jongwoon Kim, Eunmin Jeon, Youngchul Kim, Minjae Kim ; Assignee Newpowerplasma Co Ltd, Sungkyunkwan University Research and Business Foundation ; NN p. : patents.google.com : URL: https://patents.google.com/patent/US10276351/en?oq=US10276351.html (дата обращения: ДД.ММ.ГГГГ).