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Pat. 10474184 United States, Int. Cl.22 G06F 1/12, G06F 1/03, G06F 1/06, H01J 37/32, H02M 3/337, H02M 7/49, H03K 3/02, H03K 3/021, H03K 3/64, H03M 1/00, H02M 1/00. Designed waveform generator for semiconductor equipment, plasma processing apparatus, method of controlling plasma processing apparatus, and method of manufacturing semiconductor device : Appl. N 15/469899 : Filed 27.03.2017 : Pub. 12.11.2019 : / Hyun-Bae Kim, Sang-Yoon Soh, Young-Hwan Choi, Jin-Ho Kim ; Assignee Samsung Electronics Co Ltd ; NN p. : patents.google.com : URL: https://patents.google.com/patent/US10474184/en?oq=US10474184.html (дата обращения: ДД.ММ.ГГГГ).