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Pat. 10548211 United States, Int. Cl.22 H01J 37/24, G01R 21/06, G01R 23/02, H01F 27/24, H01J 37/32, H02M 3/155, H02M 5/42, H05H 1/36, H05H 1/46. Resonant network for plasma power supply and power supply device for plasma generator : Appl. N 16/136691 : Filed 20.09.2018 : Pub. 28.01.2020 : / Seung Hee Ryu, Chang Seob Lim, Hong Kweon Moon, Won Yong Sung, Geun Wan Koo, Byoung Kuk Lee ; Assignee Sungkyunkwan University Research and Business Foundation, New Power Plasma Co Ltd ; NN p. : patents.google.com : URL: https://patents.google.com/patent/US10548211/en?oq=US10548211.html (дата обращения: ДД.ММ.ГГГГ).