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Pat. 10727329 United States, Int. Cl.22 H01L 29/778, H01L 29/06, H01L 29/10, H01L 29/423, H01L 29/47, H01L 29/78, H02M 3/00, H02M 3/158, H01L 29/20. Semiconductor device : Appl. N 16/219281 : Filed 13.12.2018 : Pub. 28.07.2020 : / Yu-Syuan Lin, Jiun-Lei Yu, Ming-Cheng Lin, Chun Lin Tsai ; Assignee Taiwan Semiconductor Manufacturing Co Tsmc Ltd ; NN p. : patents.google.com : URL: https://patents.google.com/patent/US10727329/en?oq=US10727329.html (дата обращения: ДД.ММ.ГГГГ).