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Pat. 10811230 United States, Int. Cl.22 H01J 37/32, H01L 21/683, H01L 21/687, H02M 3/335, H03K 3/57, H03M 1/12, H05K 7/20. Spatially variable wafer bias power system : Appl. N 16/524967 : Filed 29.07.2019 : Pub. 20.10.2020 : / Timothy Ziemba, Ilia Slobodov, John Carscadden, Kenneth Miller, James Prager ; Assignee Eagle Harbor Technologies Inc ; NN p. : patents.google.com : URL: https://patents.google.com/patent/US10811230/en?oq=US10811230.html (дата обращения: ДД.ММ.ГГГГ).