Библиографическая ссылка на патент
Pat. 10818474 United States, Int. Cl.22 H01J 37/32, H02M 1/08, H02M 7/5395, H02M 1/00, H02M 1/44. RF generator and its operating method : Appl. N 16/421734 : Filed 24.05.2019 : Pub. 27.10.2020 : / Seunghee Ryu, Soonsang Hwang, Younghee Jang ; Assignee Newpowerplasma Co Ltd ; NN p. : patents.google.com : URL: https://patents.google.com/patent/US10818474/en?oq=US10818474.html (дата обращения: ДД.ММ.ГГГГ).