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Pat. 10861758 United States, Int. Cl.22 H01L 23/28, H01L 21/52, H01L 21/54, H01L 21/56, H01L 23/16, H01L 23/31, H02M 7/5387. Semiconductor device, power conversion apparatus, and method of manufacturing semiconductor device : Appl. N 16/447569 : Filed 20.06.2019 : Pub. 08.12.2020 : / Akitoshi Shirao ; Assignee Mitsubishi Electric Corp ; NN p. : patents.google.com : URL: https://patents.google.com/patent/US10861758/en?oq=US10861758.html (дата обращения: ДД.ММ.ГГГГ).