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Pat. 10879866 United States, Int. Cl.22 H03H 7/09, H01L 21/67, H01L 21/683, H02J 3/01, H02M 3/335, H02M 7/5387, H03H 1/00, H05B 6/02, H05B 6/36. Filter circuit, heating circuit, and semiconductor processing apparatus : Appl. N 16/386967 : Filed 17.04.2019 : Pub. 29.12.2020 : / Xiaoyang Cheng, Gang Wei, Haitao Yu ; Assignee Beijing Naura Microelectronics Equipment Co Ltd ; NN p. : patents.google.com : URL: https://patents.google.com/patent/US10879866/en?oq=US10879866.html (дата обращения: ДД.ММ.ГГГГ).