Библиографическая ссылка на патент
Pat. 11037927 United States, Int. Cl.22 H01L 27/092, H01L 21/336, H01L 21/761, H01L 21/822, H01L 21/8238, H01L 27/04, H01L 29/06, H01L 29/78, H03K 17/082, H02M 7/5387. Circuit device and electronic apparatus : Appl. N 16/361846 : Filed 22.03.2019 : Pub. 15.06.2021 : / Isamu Moriya, Atsushi Yamada ; Assignee Seiko Epson Corp ; NN p. : patents.google.com : URL: https://patents.google.com/patent/US11037927/en?oq=US11037927.html (дата обращения: ДД.ММ.ГГГГ).