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Pat. 11538670 United States, Int. Cl.22 H01J 37/24, C23C 16/455, C23C 16/50, H01J 37/32, H02M 5/458, H05H 1/24, H02M 1/00, H02M 1/32, H02M 7/06, H02M 7/5387. Controlling multiple plasma processes : Appl. N 16/664243 : Filed 25.10.2019 : Pub. 27.12.2022 : / Jan Peter Engelstaedter, Pawel Ozimek, Krzysztof Ruda, Jakub Swiatnicki ; Assignee Trumpf Huettinger Sp Zoo ; NN p. : patents.google.com : URL: https://patents.google.com/patent/US11538670/en?oq=US11538670.html (дата обращения: ДД.ММ.ГГГГ).