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Pat. 9947501 United States, Int. Cl.22 H01J 35/06, F16C 33/76, F16C 35/04, F16J 15/16, H01J 29/48, H01J 35/02, H01J 35/04, H01J 35/10, H01J 35/16, H01J 37/065, H02M 1/32, H02M 7/10, H05G 1/12. X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal : Appl. N 15/717372 : Filed 27.09.2017 : Pub. 17.04.2018 : / Roger Hadland ; Assignee Nikon Metrology Nv ; NN p. : patents.google.com : URL: https://patents.google.com/patent/US9947501/en?oq=US9947501.html (дата обращения: ДД.ММ.ГГГГ).