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Pat. 9953888 United States, Int. Cl.22 H01L 21/66, C23C 16/505, G01R 29/08, H01F 27/28, H01L 21/02, H02M 7/04. Electromagnetic detection device and semiconductor manufacturing system : Appl. N 15/379958 : Filed 15.12.2016 : Pub. 24.04.2018 : / Chung-Wei Fang, Yao-Fong Dai, Chih-Tung Lo, Ming-Hsien Tsai, Kai-Wen Wu ; Assignee Taiwan Semiconductor Manufacturing Co Tsmc Ltd ; NN p. : patents.google.com : URL: https://patents.google.com/patent/US9953888/en?oq=US9953888.html (дата обращения: ДД.ММ.ГГГГ).