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Pat. 9966445 United States, Int. Cl.22 H01L 21/285, H01L 21/66, H01L 23/31, H01L 23/495, H01L 29/20, H01L 29/205, H01L 29/417, H01L 29/423, H01L 29/47, H01L 29/66, H01L 29/778, H02M 1/42, H02M 3/335, H03F 1/32, H03F 3/19, H03F 3/21. Semiconductor device and method of manufacturing semiconductor device : Appl. N 15/250147 : Filed 29.08.2016 : Pub. 08.05.2018 : / Masahito Kanamura ; Assignee Fujitsu Ltd ; NN p. : patents.google.com : URL: https://patents.google.com/patent/US9966445/en?oq=US9966445.html (дата обращения: ДД.ММ.ГГГГ).